ASML is making progress in the performance of its latest extreme ultraviolet (EUV) lithography system and demonstrated its NXE 3400B system delivering 140 wafers/hour....

Samsung Electronics is said to heavily invest many semiconductor manufacturing equipment from Dutch ASML, as the company is trying to gain a competitive edge...

Semiconductor industry finally appears close to moving extreme ultraviolet (EUV) lithography into high volume production, as lithography vendor ASML demonstrated a 250-watt EUV source....

Manufacturer of chip-making equipment ASML Holding NV today announced at SEMICON West lithography, metrology and new software solutions, designed to enable chip makers to...

ASML is filing initial legal claims against Nikon for infringement of more than 10 patents, related to a broad range of products in the...

Nikon filed lawsuits in the Netherlands, Germany and Japan against ASML, the world's third-largest chip equipment maker, and Carl Zeiss, saying its lithography technology...

At the SPIE Advanced Lithography conference, ASML announced the NXE:3400B, the extreme ultraviolet lithography scanner that it hopes makes it into volume-production fabs....

ASML Holding NV, Europe's largest semiconductor-equipment maker, has won orders for six more of its newest lithography machines in the fourth quarter.

First-quarter...