Canon is developing a next-generation semiconductor lithography system employing nanoimprint technology that makes possible sub-20 nm processes. Within the high-resolution patterning segment, where 193 nm...

Despite the progress in the ultraviolet lithography (EUV) technology, it seems that the global semiconductor industry will face major technical difficulties on fulfilling the requirements...

ASML, the world’s largest suppliers of chipmaking equipment, says that its latest hihg-end equipment for EUV lithography will be deliverd soon and will be ready...