Samsung Electronics has reportedly started using extreme ultraviolet (EUV) lithography to develop 1ynm DRAM memory.

News1 Korea claims that Samsung is expected to enter production of DRAM chips built using its EUV 1ynm process technology by 2020.

Samsung has disclosed its logic IC foundry business is gearing up for production of its first EUV process technology. Samsung Foundry's 7LPP (7nm Low Power Plus) process will be ready for production in the second half of 2018, said the company, adding that key IPs are under development aiming to be completed by the first half of 2019.